Pioneering a sustainable abrasive-free planarization for advanced chip manufacturing

HIGH YIELDS

Abrasive-Free solution engineered to minimize defects and improve yield

MAXIMUM PRODUCTIVITY

Plug and Play CMP materials with improved lifetime

Integrated planarization technology with no abrasives lowers cost of ownership

LOW COST OF OWNERSHIP

Benign chemistry coupled with abrasive-free planarization makes metal recovery and water recycle possible

SUSTAINABILITY

LOW COST OF OWNERSHIP

HIGH YIELDS

MAXIMUM PRODUCTIVITY

SUSTAINABILITY